Kla tencor sp1 manual

surfscan sp7
kla tencor wafer inspection

of the wafer surface. It's production proven (SP1) edge handling Surfscan SP2 is compatible with KLA-Tencor's iSupport' network, which includes expert onsite 8 Sep 1992 the express written permission of TENCOR INSTRUMENTS, 2400 This manual and the Surfscan 6100/6200 Wafer Surface Analysis Sys-. SurfscanSP1DLS. Unpatterned Surface Inspection Solution. THE SURFSCAN SP1 DLS IS THE FIRST 300 MM INSPECTION SYSTEM that provides brightfield, 10. 100. Log Sensitivity (nm). 6420. 6220. SP1. SP1 DLS. SP2. SP2XP. SP3. 1997. 2005. 2011. 250. >500. 65. 22. Industry Design Rule (nm). SURFSCAN SP3: ClassOne Equipment is the world leader in refurbished KLA-Tencor Wafer. Metrology and Inspection Equipment. With a large inventory and a dedicated. KLA-Tencor Surfscan SP1 TBI Unpatterned Surface Inspection System for sale. Price: Request Price Operations Manual for KLA-Tencor SP1 TBI. Condition:. 15 Aug 2013 Hynix Semiconductor Corporation and KLA-Tencor Corporation . 2nd Step - Manual visual inspection for confirmation Figure 4: Signal-to-noise vs. wafer haze level comparison (Surfscan SP1 left, SP2 right) for defects of varying size.KLA-Tencor SP1 Classic Wafer Surface Analysis System consisting of: - Model: Surfscan SP1 Classic- Wafer size: Operations Manual for KLA SP1 Classic. This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be